Influence of Fe2O3 Dust Particles on the Plasma Characteristics of D.C Sputtering System

Shahad Emaduldeen  Abdulghani; Qusay A.  Abbas

doi:10.24996/ijs.2022.63.7.18

Authors

Shahad Emaduldeen Abdulghani Physics department, College of Science, University of Baghdad, Baghdad, Iraq
Qusay A. Abbas Physics department, College of Science, University of Baghdad, Baghdad, Iraq

DOI:

https://doi.org/10.24996/ijs.2022.63.7.18%20

Keywords:

Dust plasma,, Optical emission spectroscopy,, electron temperature,, electron density, Plasma parameters

Abstract

This work is an experimental study conducted to study the effects of iron oxide dust particles (Fe₂O₃) on the characteristics of DC discharge plasma in argon gas under vacuum. Electron temperature ( ) and electron density (n_e) were calculated by Boltzmann plots and Stark broadening, respectively. The results show that both the electron density and plasma frequency ( ) increased with the operating pressure. While, and Debye length ( ) decreased with pressure. The glow discharge is more stable with the Fe₂O₃-dust particles; all dust plasma parameters have lower values than those of the dust-free plasma.