Influence of Fe2O3 Dust Particles on the Plasma Characteristics of D.C Sputtering System
Keywords:Dust plasma,, Optical emission spectroscopy,, electron temperature,, electron density, Plasma parameters
This work is an experimental study conducted to study the effects of iron oxide dust particles (Fe2O3) on the characteristics of DC discharge plasma in argon gas under vacuum. Electron temperature ( ) and electron density (ne) were calculated by Boltzmann plots and Stark broadening, respectively. The results show that both the electron density and plasma frequency ( ) increased with the operating pressure. While, and Debye length ( ) decreased with pressure. The glow discharge is more stable with the Fe2O3-dust particles; all dust plasma parameters have lower values than those of the dust-free plasma.