Spectroscopic study of AL nitrogen plasma produced by DC glow discharge
Keywords:
Nitrogen plasma, Glow discharge, Spectroscopy, Temperature electron, Density electronAbstract
The work done in this paper to study properties for nitrogen plasma generated by method electrical discharge when the aluminum was a target. Experimental study on the effect electrodes material, applied voltages on spectroscopic parameter for DC discharge plasma in Nitrogen gas using planner electrodes were done.
The electron temperature, increase with increasing applied voltage from (700 to 1100) V. While the plasma density, calculate by Stark broadening effect, which increase with it.
The peaks intensities for N2 transition (λ= 336.6 nm and 391.4 nm) increase with increasing applied voltage. The vibrational energy (TVib) for N2 molecular increase from 0.165 to 0.185 eV with increasing applied voltage from (700 to 1100) V, which less than the calculated electron temperature.