Fabrication of TiO2 sensor using rapid breakdown anodization method to measure pressure, humidity and sense gases at room temperature

Authors

  • Reem Saadi Khaleel Department of Physics, Education College, Mustansiriyah University, Baghdad, Iraq
  • Mustafa Shakir Hashim Department of Physics, Education College, Mustansiriyah University, Baghdad, Iraq

DOI:

https://doi.org/10.24996/ijs.2019.60.8.6

Keywords:

Rapid breakdown anodization, TiO2, sensor, humidity, Ammonia, Ethanol

Abstract

Rapid breakdown anodization (RBA) process was used to fabricate TiO2 sensor to measure pressure and humidity and sense gases at room temperature. This chemical process transformed Ti to its oxide (TiO2) as a powder with amorphous phase as X ray diffraction (XRD) technique confirmed.  This oxide consisted from semi spherical nanoparticles and titania nanotubes (TNTs) as Scanning electron microscope (SEM) technique showed.  TiO2 powder was deposited on Ti substrates by using electrophoretic deposition (EPD) method.   Average pressure sensitivity was 0.34 MΩ/bar and hysteresis area was 1.4 MΩ .bar. Resistance of TiO2 decreased exponentially with the increasing of relative humidity (RH%). The sensitivity% of TiO2 for RH% was greater than 70% in the range of (50-95). TiO2 was tested as a sensor for Ammonia, Ethanol and Methanol. Its sensitivity and selectivity towards Ammonia were the greatest but the shortest response and recovery times were recorded toward Methanol.

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Published

2019-08-26

Issue

Section

Physics

How to Cite

Fabrication of TiO2 sensor using rapid breakdown anodization method to measure pressure, humidity and sense gases at room temperature. (2019). Iraqi Journal of Science, 60(8), 1694-1703. https://doi.org/10.24996/ijs.2019.60.8.6

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